Closed form models for pull-in voltage of electrostatically actuated cantilever beams and their comparative analysis
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May 11, 2011
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Abstract
Evaluation of pull-in voltage is significant for the design of electrostatically actuated MEMS devices. This paper presents simple closed form models for fast and accurate computation of pull-in voltage of electrostatically actuated cantilever beams. These models are obtained based on five different capacitance models suitable for wide range of dimensions. Using these models pull-in voltages are computed for different range of dimensions and the results are compared with the experimentally verified 3D finite element analysis results. The results show that, for every given range of dimension, choice of the model changes for the evaluation of the pull-in voltage with a maximum deviation of ±2%. Therefore for a given range of dimension appropriate closed form model is to be chosen for accurate computation of pull-in voltage.
Evaluation of pull-in voltage is significant for the design of electrostatically actuated MEMS devices. This paper presents simple closed form models for fast and accurate computation of pull-in voltage of electrostatically actuated cantilever beams. These models are obtained based on five different capacitance models suitable for wide range of dimensions. Using these models pull-in voltages are computed for different range of dimensions and the results are compared with the experimentally verified 3D finite element analysis results. The results show that, for every given range of dimension, choice of the model changes for the evaluation of the pull-in voltage with a maximum deviation of ±2%. Therefore for a given range of dimension appropriate closed form model is to be chosen for accurate computation of pull-in voltage.